Importance

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Abstract

A pressure sensor 10 is made up of silicon diaphragm 12 sandwiched between two housing members 20 and 22 with external conduits 24, 26. The diaphragm 12 has a central rigid disc 14 which moves axially like a piston, a peripheral rim 16 and an integral web 18. The rim 16 is undercut to provide recesses 46 and 48 (FIG. 1 ) or recess 50 (FIG. 6) which reduces the net reactive forces tending to separate the joints 42 and 44 between rim 16 and the housing parts 20, 22. Overpressure stop surfaces 28 and 30 on the inside of the housing cavity form capacitor gaps with the opposite flat sides of rigid disc 14 for signal output to readout circuitry 40 in the rated range. Configurations for gage pressure and absolute pressure are disclosed, as well as a system of isolation from corrosive process environments.

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First Claim