Method and apparatus for the electrolytic preparation of group IV and V hydrides
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United States of America Patent
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Oct 27, 1992
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N/A
app pub date -
Mar 22, 1991
filing date -
Mar 22, 1991
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Abstract
An electrochemical apparatus and method for supplying volatile hydrides of sufficient purity, at the proper pressure, and in the required volume, for direct introduction into a chemical vapor deposition reactor in which semiconductors are manufactured and doped.
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