Pneumatic energy fluxmeter
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 27, 1992
Issued Date -
N/A
app pub date -
Apr 2, 1992
filing date -
Sep 28, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A fluxmeter which provides for a pneumatic apparatus for measuring an amount of plasma energy flux flowing into a semiconductor wafer provides for a non-electrical apparatus of measuring energy flux. A bulb has one end exposed to the plasma while the opposite end is supported by a heat sink. When plasma is applied, gas pressure in the bulb changes due to a change in temperature. This change in gas pressure is measured to provide a direct correlation to a value of energy flux impinging on the fluxmeter.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully