Arc-magnetron and the method of coating
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United States of America Patent
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Nov 3, 1992
Grant Date -
N/A
app pub date -
May 16, 1991
filing date -
May 28, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An arc magnetron is described in which an edge magnet arrangement is displaceable in the axial direction relative to a preferably fixedly mounted center pole permanent magnet so that a cathode sputtering process and/or an arc discharge process can be realized in dependence on the relative position of the edge magnet arrangement and the center pole magnet.
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