Method for removing contaminants by maintaining the plasma in abnormal glow state
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United States of America Patent
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-
Nov 17, 1992
Issued Date -
N/A
app pub date -
May 22, 1991
filing date -
Aug 3, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus is disclosed for abrading contaminants from the surface of a workpiece using plasma glow discharge. The workpieces are positioned in a low pressure chamber with an ionizable gas. A pair of spaced, conductive, interfacing panels form electrodes mounted within the chamber and defining a three-dimensional cleaning space between the electrodes. The electrodes are energized by a power supply, providing an alternating voltage at an ultrasonic frequency and the pressure is maintained to allow only abnormal glow discharge. After initiation of the abnormal glow discharge the electrode current is sensed to detect when to inject additional ionizable gas into the low pressure chamber.
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