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Abstract

A ceramic capacitive pressure transducer capable of withstanding high pressures without undue internal stresses incorporates a deflecting diaphragm having a three-dimensional contoured surface adjacent a central electrode bearing region and within a rigid periphery. A planar electrode bearing region of predetermined thickness is defined by a concavity on the pressure receiving side, limited by a shoulder at the periphery, and a groove on the electrode bearing side. This configuration primarily deforms in the contoured region, with tensile stresses arising from interior deflection of the electrode bearing region and rigid seating of the periphery being distributed through the groove region and also cancelling to some extent such that axial, radial and tangential stresses all are held well below allowable stress levels for the material.

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First Claim