Micromechanical sensor employing a SQUID to detect movement
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United States of America Patent
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Nov 24, 1992
Grant Date -
N/A
app pub date -
Nov 13, 1990
filing date -
Nov 13, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micromechanical sensor comprises a support, a micromechanical element that is movable relative to the support under the application of a stimulus, and a transducer. The transducer comprises a first component carried by the micromechanical element and movable therewith, and a second component stationary relative to the support. One of the first and second transducer components is a member for establishing a magnetic field and the other of the first and second transducer components is a SQUID positioned in the magnetic field for detecting variation in the magnetic field due to relative movement of the micromechanical element and the support.
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