Intelligent system for processing and storing articles

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United States of America Patent

PATENT NO 5166884
SERIAL NO

07797714

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

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Patent Owner(s)

Patent OwnerAddress
ASYST TECHNOLOGIES INC A CORP OF CA1745 MCCANDLESS DR MILPITAS CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bonora, Anthony C Menlo Park, CA 117 6049
Brain, Michael D Oakland, CA 15 431
Maney, George A Sunnyvale, CA 7 611
Parikh, Mihir San Jose, CA 23 926

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