Filtering and dispensing system with independently activated pumps in series

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United States of America Patent

PATENT NO 5167837
SERIAL NO

07329525

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A fluid dispensing system is provided which has first diaphragm pump means, a filter connected to receive the discharge of the first pump, and second diaphragm pump means connected to the receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid. In addition, pressure sensing means are provided to indicate the pressure of the actuating hydraulic fluids, and computer controller means may be utilized to monitor, adjust and control the rates and intervals of filtering and dispense of the system in response to said pressure sensing means or otherwise.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD RD BILLERICA MA 01821

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Farney, Michael K Perryton, TX 8 514
Gibson, Gregory M Dallas, TX 27 903
Snodgrass, Ocie T Garland, TX 15 673

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