Rotating cylindrical magnetron structure with self supporting zinc alloy target
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United States of America Patent
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Dec 15, 1992
Grant Date -
N/A
app pub date -
May 21, 1991
filing date -
May 21, 1991
priority date (Note) -
Expired
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Abstract
Alloys useful for preparing self-supporting cylindrical targets are provided. The alloys comprise zinc and one or more other metals chosen from the following: aluminum, bismuth, cerium, gadolinium, hafnium, niobium, silicon, tantalum, titanium, vanadium, yttrium, and zirconium. In one preferred embodiment, a zinc alloy with approximately 2% aluminum forms self-supporting cylindrical targets from which metal oxide films are prepared by reactive sputtering. The alloy oxide films are clear, transparent, non-absorbing, and optically functional.
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