Importance

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Abstract

A displacement-measuring apparatus including a cylindrical housing, a static-pressure bearing located within the housing, a probe shaft supported by the bearing so that the bearing is supported in non-contact fashion and is movable in the axial direction, and a stylus connected to the end of the probe shaft so as to apply pressure to an object. Part of the static-pressure bearing includes a hollow cylindrical bush and at least two restriction holes formed in the bush and equidistantly spaced along the circumference of the bush. These holes supply air into the gap between the probe shaft and the bush. The static-pressure bearing further includes a first set of grooves formed in the inner surface of the bush that extend along the axis of the bush so that each opposes at least one restriction hole, and a second set of grooves formed in the circumferential surface of the probe shaft that extend along the axis of the probe shaft. The second set of grooves are arranged in pairs with each pair being made of two grooves that are symmetrical with respect to the corresponding groove of the first set.

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First Claim