Surface treating apparatus and method using vapor
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United States of America Patent
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-
Dec 29, 1992
Grant Date -
N/A
app pub date -
Apr 20, 1990
filing date -
Apr 28, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A surface treating apparatus using vapor includes a container for holding two liquids, e.g., hydrogen fluoride and water, which exhibits an azeotropic phenomenon under predetermined conditions, and an azeotropic condition establishing device for conditioning the container to satisfy the predetermined azeotropic conditions. Under the azeotropic conditions, a vapor mixture having the composition of the liquid mixture is produced, and surface treatment of substrates or the like is performend using the vapor mixture. Since the vapor of the liquid mixture in the azeotropic state is used for surface treatment of substrate, surface treatment is effected under fixed conditions all the time.
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