IC test equipment
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United States of America Patent
Stats
-
Jan 5, 1993
Grant Date -
N/A
app pub date -
Oct 11, 1991
filing date -
Oct 12, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vertical drive unit is mounted on a fixed beam provided above a performance board for testing IC elements and fixed to a support frame. An X-Y carrier head of an X-Y transport unit mounted on the support frame is movable in a planar area including space between the vertical drive unit and the performance board. The X-Y carrier head has a vertical guide, by which an air chuck for sucking up and holding an IC element is supported so that it is movable in the vertical direction. The X-Y carrier head is brought to a predetermined position above the test head, the air chuck is brought down by the vertical drive unit, and then terminals of the IC element are pressed into contact with an IC socket on the performance board at a predetermined pressure.
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