Method for purifying gas distribution systems

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United States of America Patent

PATENT NO 5178651
SERIAL NO

07741651

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus (10) for purifying gas distribution systems has a gas inlet (12) and a gas outlet (14) for connection to gas distribution lines (54). A housing (22) encloses a resistance heater (24) and a particle filter (26) for the gas. The resistance heater (24) is connected to the gas inlet (12) and the particle filter (26) is connected between the resistance heater (24) and the gas outlet (14). The resistance heater includes a sealed tube (26) defining a gas plenum (28). A resistance heater element enclosed in a cylindrical Inconel alloy shell (30) is centrally disposed in the sealed tube (26). A spiral ridge (32) winds around the shell (30) to define a spiral path for gas flowing through the plenum (28). The spiral ridge (32) has a narrower pitch near the gas inlet (12) and a wider pitch moving toward the filter (26) end of the plenum (28).

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Patent Owner(s)

Patent OwnerAddress
CELERITY INC200-C PARKER DRIVE SUITE 600 AUSTIN TX 78729

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balma, Frank R 38770 Moore Dr., Fremont, CA 94536 2 118
Elliot, Brent D 1252 Santa Paula Ave., San Jose, CA 95110 5 239

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