Apparatus for applying liquid agent on surface of rotating substrate
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United States of America Patent
Stats
-
Jan 19, 1993
Grant Date -
N/A
app pub date -
Jun 14, 1990
filing date -
Jun 14, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for applying liquid agent to a substrate includes a cup member for preventing liquid agent from scattering. Cleaning agent is supplied to an inner circumferential surface of the cup member through openings located at an upper portion of the inner circumferential surface. The structure for supplying the cleaning agent is integrally formed on an outer circumferential surface of the cup member. The apparatus also has a slanted surface for regulating and guiding air, liquid agent and cleaning agent downwardly through the cup member. Cleaning agent is supplied to the slanted surface through openings which are located at an upper portion thereof. Preferably, the openings are angled so that cleaning agent is directed substantially horizontally therefrom. Preferably, the apparatus has fine irregularities for spreading cleaning agent on the inner circumferential and slanted surfaces.
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Cited Art Landscape
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