Active control precision damping table

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United States of America Patent

PATENT NO 5180958
SERIAL NO

07680173

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An active control precision damping table supported by air springs. Level displacement and vibrations of the table are detected by a sensor or sensors, and sensor outputs are fed to a variation adder which carries out an adding operation on one of the sensor outputs and an inversion signal produced by inverting the other sensor output 180 degrees. The adder outputs results of the operation to a drive circuit, which in turn outputs a drive signal to a control valve. The control valve is operable in response to the drive signal to adjust air pressure in pressure vessels of the air springs.

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Patent Owner(s)

  • TOKKYO KIKI KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choshitani, Hitoshi Ibaraki, JP 2 24
Itojima, Fumiaki Yao, JP 6 116
Osaka, Takahide Itami, JP 3 53
Yasuda, Masashi Suita, JP 38 391

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