Single diaphragm transducer with multiple sensing elements
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United States of America Patent
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Feb 9, 1993
Issued Date -
N/A
app pub date -
Jun 29, 1992
filing date -
Jun 22, 1989
priority date (Note) -
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Abstract
A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements preferably comprises a plurality of piezoresistors each of which are coupled in a Wheatstone bridge configuration. This transducer achieves sensitive, accurate, high spatial resolution measurements of non-uniform pressures.
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