Versatile, overpressure proof, absolute pressure sensor
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United States of America Patent
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Feb 16, 1993
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N/A
app pub date -
Dec 28, 1989
filing date -
Dec 28, 1989
priority date (Note) -
Expired
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Abstract
A non membrane-based overpressure proof gas pressure microsensor. It is not a membrane-based microsensor but is based on an open microbridge sensor structure. A method and apparatus is described to determine gas pressure from thermal conductivity, k, and volumetric specific heat, c.sub.pu, as well as pressure, P, using a microbridge sensor.
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