Process for removing dissolved oxygen from water and system therefor

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United States of America Patent

PATENT NO 5190627
SERIAL NO

07873680

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Abstract

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Ultrapure water is formed by a process employing a simple system for safely and easily removing oxygen from water containing dissolved oxygen; which process comprises dissolving a reducing agent in water containing dissolved oxygen and irradiating the resulting water with ultraviolet rays. The ultrapure water is particularly utilized as a rinsing water in the electronics industry.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510 ?1448510
EBARA RESEARCH CO LTD4-2-1 HONFUJISAWA FUJISAWA-SHI KANAGAWA-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arimitsu, Hidenobu Atsugi, JP 4 23
Iwase, Yoko Fujisawa, JP 1 13
Nakajima, Ken Kamakura, JP 78 1210
Saito, Takayuki Hiratsuka, JP 172 2014
Shima, Hiroyuki Fujisawa, JP 14 204

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