US Patent No: 5,192,395

Number of patents in Portfolio can not be more than 2000

Method of making a digital flexure beam accelerometer

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Abstract

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It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX18253

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boysel, Robert M Plano, TX 16 1228
Sampsell, Jeffrey B San Jose, CA 247 13380

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (6)
4,553,436 Silicon accelerometer 80 1982
4,566,935 Spatial light modulator and method 512 1984
4,710,732 Spatial light modulator and method 490 1984
4,662,746 Spatial light modulator and method 495 1985
4,956,619 Spatial light modulator 581 1988
4,954,789 Spatial light modulator 569 1989
 
Honeywell Inc. (1)
4,855,544 Multiple level miniature electromechanical accelerometer switch 65 1988

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (196)
7,123,216 Photonic MEMS and structures 556 1999
7,138,984 Directly laminated touch sensitive screen 108 2001
7,042,643 Interferometric modulation of radiation 186 2002
7,110,158 Photonic MEMS and structures 179 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 31 2002
7,297,471 Method for manufacturing an array of interferometric modulators 19 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 106 2003
7,460,291 Separable modulator 54 2003
7,012,726 MEMS devices with unreleased thin film components 76 2003
7,198,973 Method for fabricating an interference display unit 102 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 152 2003
7,692,844 Interferometric modulation of radiation 23 2004
7,532,194 Driver voltage adjuster 4 2004
7,119,945 Altering temporal response of microelectromechanical elements 137 2004
7,706,050 Integrated modulator illumination 32 2004
7,193,768 Interference display cell 24 2004
7,476,327 Method of manufacture for microelectromechanical devices 39 2004
7,060,895 Modifying the electro-mechanical behavior of devices 49 2004
7,280,265 Interferometric modulation of radiation 46 2004
7,164,520 Packaging for an interferometric modulator 38 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 50 2004
7,893,919 Display region architectures 9 2005
7,813,026 System and method of reducing color shift in a display 16 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 18 2005
7,424,198 Method and device for packaging a substrate 3 2005
7,142,346 System and method for addressing a MEMS display 32 2005
7,515,147 Staggered column drive circuit systems and methods 14 2005
7,379,227 Method and device for modulating light 13 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 40 2005
7,289,259 Conductive bus structure for interferometric modulator array 67 2005
7,460,246 Method and system for sensing light using interferometric elements 12 2005
7,560,299 Systems and methods of actuating MEMS display elements 21 2005
7,012,732 Method and device for modulating light with a time-varying signal 63 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 8 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 4 2005
7,259,449 Method and system for sealing a substrate 16 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 4 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 6 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 8 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 8 2005
7,299,681 Method and system for detecting leak in electronic devices 2 2005
7,920,135 Method and system for driving a bi-stable display 5 2005
7,679,627 Controller and driver features for bi-stable display 3 2005
7,586,484 Controller and driver features for bi-stable display 17 2005
7,535,466 System with server based control of client device display features 9 2005
7,532,195 Method and system for reducing power consumption in a display 8 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 48 2005
7,289,256 Electrical characterization of interferometric modulators 13 2005
7,602,375 Method and system for writing data to MEMS display elements 4 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
7,321,456 Method and device for corner interferometric modulation 43 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 4 2005
7,372,613 Method and device for multistate interferometric light modulation 74 2005
7,889,163 Drive method for MEMS devices 20 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 43 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 4 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 39 2005
7,547,565 Method of manufacturing optical interference color display 13 2005
7,527,995 Method of making prestructure for MEMS systems 31 2005
7,808,703 System and method for implementation of interferometric modulator displays 5 2005
7,349,136 Method and device for a display having transparent components integrated therein 8 2005
RE42119 Microelectrochemical systems device and method for fabricating same 7 2005
8,008,736 Analog interferometric modulator device 4 2005
7,710,629 System and method for display device with reinforcing substance 4 2005
8,124,434 Method and system for packaging a display 1 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 27 2005
7,471,444 Interferometric modulation of radiation 14 2005
7,388,706 Photonic MEMS and structures 15 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 26 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 65 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 9 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 15 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 8 2005
8,878,825 System and method for providing a variable refresh rate of an interferometric modulator display 0 2005
7,304,784 Reflective display device having viewable display on both sides 45 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 83 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 32 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 5 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 3 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 34 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 17 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 19 2005
7,136,213 Interferometric modulators having charge persistence 16 2005
7,564,612 Photonic MEMS and structures 71 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 201 2005
7,369,294 Ornamental display device 46 2005
7,684,104 MEMS using filler material and method 11 2005
7,653,371 Selectable capacitance circuit 18 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 5 2005
7,675,669 Method and system for driving interferometric modulators 4 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 11 2005
7,545,550 Systems and methods of actuating MEMS display elements 5 2005
8,310,441 Method and system for writing data to MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 6 2005
7,486,429 Method and device for multistate interferometric light modulation 12 2005
7,236,284 Photonic MEMS and structures 94 2005
7,630,114 Diffusion barrier layer for MEMS devices 3 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 4 2005
7,355,779 Method and system for driving MEMS display elements 4 2006
7,916,980 Interconnect structure for MEMS device 2 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 8 2006
8,194,056 Method and system for writing data to MEMS display elements 1 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 8 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 28 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 46 2006
7,483,197 Photonic MEMS and structures 18 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 13 2006
7,532,377 Movable micro-electromechanical device 38 2006
7,643,203 Interferometric optical display system with broadband characteristics 24 2006
7,948,457 Systems and methods of actuating MEMS display elements 1 2006
7,903,047 Mode indicator for interferometric modulator displays 3 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 2 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 8 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 5 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 50 2006
8,049,713 Power consumption optimized display update 2 2006
7,920,136 System and method of driving a MEMS display device 1 2006
7,706,044 Optical interference display cell and method of making the same 9 2006
7,880,954 Integrated modulator illumination 17 2006
7,369,292 Electrode and interconnect materials for MEMS devices 16 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 19 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,161,094 Modifying the electro-mechanical behavior of devices 25 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 84 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 18 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 6 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 73 2006
7,187,489 Photonic MEMS and structures 91 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 7 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 10 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 50 2006
7,777,715 Passive circuits for de-multiplexing display inputs 3 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 13 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 4 2006
7,566,940 Electromechanical devices having overlying support structures 12 2006
7,534,640 Support structure for MEMS device and methods therefor 15 2006
7,830,586 Transparent thin films 18 2006
7,554,711 MEMS devices with stiction bumps 44 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 6 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 35 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 4 2006
7,928,940 Drive method for MEMS devices 0 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 7 2006
7,388,697 System and method for addressing a MEMS display 8 2006
7,242,512 System and method for addressing a MEMS display 9 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 6 2006
7,706,042 MEMS device and interconnects for same 4 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 34 2006
8,059,326 Display devices comprising of interferometric modulator and sensor 6 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 2 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 17 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 5 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 7 2007
7,623,752 System and method of testing humidity in a sealed MEMS device 5 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 4 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 3 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
8,085,458 Diffusion barrier layer for MEMS devices 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
8,817,357 Mechanical layer and methods of forming the same 0 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
8,878,771 Method and system for reducing power consumption in a display 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
8,885,244 Display device 0 2013
 
CARNEGIE MELLON UNIVERSITY (2)
5,658,636 Method to prevent adhesion of micromechanical structures 6 1995
5,772,902 Method to prevent adhesion of micromechanical structures 24 1996
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 26 2004
 
CONTINENTAL AUTOMOTIVE GMBH (1)
5,821,419 Micromechanical sensor unit for detecting acceleration 8 1996
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (1)
7,471,441 Flexures 0 2006
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 33 2004
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 74 2004
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,526,688 Digital flexure beam accelerometer and method 212 1994
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
5,659,195 CMOS integrated microsensor with a precision measurement circuit 178 1995
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 10 2005