US Patent No: 5,192,395

Number of patents in Portfolio can not be more than 2000

Method of making a digital flexure beam accelerometer

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Abstract

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It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX16406

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boysel, Robert M Plano, TX 15 1282
Sampsell, Jeffrey B Plano, TX 165 15004

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (6)
* 4,553,436 Silicon accelerometer 83 1982
* 4,566,935 Spatial light modulator and method 533 1984
* 4,710,732 Spatial light modulator and method 502 1984
* 4,662,746 Spatial light modulator and method 511 1985
* 4,956,619 Spatial light modulator 601 1988
* 4,954,789 Spatial light modulator 599 1989
 
Honeywell Inc. (1)
* 4,855,544 Multiple level miniature electromechanical accelerometer switch 66 1988
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
* 5,659,195 CMOS integrated microsensor with a precision measurement circuit 202 1995
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 83 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (2)
* 2006/0277,486 File or user interface element marking system 1 2005
7,471,441 Flexures 0 2006
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 12 2005
 
CONTINENTAL AUTOMOTIVE GMBH (1)
* 5,821,419 Micromechanical sensor unit for detecting acceleration 9 1996
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
* 2005/0277,277 Dual damascene process 0 2005
 
QUALCOMM MEMS TECHNOLOGIES, INC. (321)
7,123,216 Photonic MEMS and structures 610 1999
7,138,984 Directly laminated touch sensitive screen 133 2001
* 2002/0075,555 Interferometric modulation of radiation 460 2001
7,042,643 Interferometric modulation of radiation 218 2002
* 2002/0126,364 Interferometric modulation of radiation 61 2002
7,110,158 Photonic MEMS and structures 204 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 47 2002
* 2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 309 2002
7,297,471 Method for manufacturing an array of interferometric modulators 27 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 122 2003
* 2004/0263,944 Thin film precursor stack for MEMS manufacturing 31 2003
7,460,291 Separable modulator 70 2003
7,012,726 MEMS devices with unreleased thin film components 93 2003
7,198,973 Method for fabricating an interference display unit 118 2003
* 2004/0209,192 Method for fabricating an interference display unit 2 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 167 2003
7,692,844 Interferometric modulation of radiation 42 2004
7,532,194 Driver voltage adjuster 6 2004
* 2005/0168,431 Driver voltage adjuster 50 2004
7,119,945 Altering temporal response of microelectromechanical elements 154 2004
7,706,050 Integrated modulator illumination 42 2004
* 2005/0195,468 Integrated modulator illumination 77 2004
7,193,768 Interference display cell 25 2004
* 2005/0046,948 Interference display cell and fabrication method thereof 24 2004
* 2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 247 2004
* 2005/0036,095 Color-changeable pixels of an optical interference display panel 250 2004
7,476,327 Method of manufacture for microelectromechanical devices 55 2004
7,060,895 Modifying the electro-mechanical behavior of devices 65 2004
* 2005/0247,477 Modifying the electro-mechanical behavior of devices 18 2004
* 2005/0249,966 Method of manufacture for microelectromechanical devices 152 2004
7,280,265 Interferometric modulation of radiation 50 2004
7,164,520 Packaging for an interferometric modulator 53 2004
* 2005/0002,082 Interferometric modulation of radiation 59 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 57 2004
* 2006/0007,517 Structure of a micro electro mechanical system 106 2004
7,893,919 Display region architectures 21 2005
7,813,026 System and method of reducing color shift in a display 22 2005
* 2006/0077,514 System and method of reducing color shift in a display 15 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 19 2005
7,424,198 Method and device for packaging a substrate 5 2005
* 2006/0067,641 Method and device for packaging a substrate 1 2005
7,142,346 System and method for addressing a MEMS display 45 2005
7,515,147 Staggered column drive circuit systems and methods 16 2005
* 2006/0044,246 Staggered column drive circuit systems and methods 85 2005
7,379,227 Method and device for modulating light 20 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 52 2005
7,289,259 Conductive bus structure for interferometric modulator array 83 2005
* 2006/0077,507 Conductive bus structure for interferometric modulator array 1 2005
* 2006/0077,510 System and method of illuminating interferometric modulators using backlighting 0 2005
* 2005/0244,949 Method and device for modulating light 24 2005
* 2006/0066,594 Systems and methods for driving a bi-stable display element 40 2005
7,460,246 Method and system for sensing light using interferometric elements 14 2005
* 2006/0066,876 Method and system for sensing light using interferometric elements 4 2005
7,560,299 Systems and methods of actuating MEMS display elements 27 2005
* 2006/0057,754 Systems and methods of actuating MEMS display elements 37 2005
7,012,732 Method and device for modulating light with a time-varying signal 85 2005
* 2005/0231,790 Method and device for modulating light with a time-varying signal 17 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 9 2005
* 2006/0066,863 Electro-optical measurement of hysteresis in interferometric modulators 6 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 5 2005
* 2006/0077,145 Device having patterned spacers for backplates and method of making the same 11 2005
7,259,449 Method and system for sealing a substrate 18 2005
* 2006/0065,622 Method and system for xenon fluoride etching with enhanced efficiency 5 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 13 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 9 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 19 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 11 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 9 2005
7,299,681 Method and system for detecting leak in electronic devices 3 2005
* 2006/0077,502 Methods of fabricating interferometric modulators by selectively removing a material 0 2005
* 2006/0067,642 Method and device for providing electronic circuitry on a backplate 9 2005
* 2006/0065,043 Method and system for detecting leak in electronic devices 1 2005
* 2006/0066,932 Method of selective etching using etch stop layer 70 2005
* 2005/0250,235 Controlling electromechanical behavior of structures within a microelectromechanical systems device 25 2005
7,920,135 Method and system for driving a bi-stable display 13 2005
7,679,627 Controller and driver features for bi-stable display 10 2005
7,586,484 Controller and driver features for bi-stable display 25 2005
7,535,466 System with server based control of client device display features 22 2005
7,532,195 Method and system for reducing power consumption in a display 10 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 65 2005
7,289,256 Electrical characterization of interferometric modulators 15 2005
* 2006/0077,523 Electrical characterization of interferometric modulators 7 2005
* 2006/0066,597 Method and system for reducing power consumption in a display 38 2005
* 2006/0066,504 System with server based control of client device display features 41 2005
* 2006/0067,643 System and method for multi-level brightness in interferometric modulation 1 2005
* 2006/0066,503 Controller and driver features for bi-stable display 38 2005
* 2006/0066,596 System and method of transmitting video data 30 2005
7,602,375 Method and system for writing data to MEMS display elements 8 2005
* 2006/0066,559 Method and system for writing data to MEMS display elements 33 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
* 2006/0076,634 Method and system for packaging MEMS devices with incorporated getter 18 2005
7,321,456 Method and device for corner interferometric modulation 61 2005
* 2006/0077,515 Method and device for corner interferometric modulation 1 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 8 2005
7,372,613 Method and device for multistate interferometric light modulation 91 2005
* 2006/0077,505 Device and method for display memory using manipulation of mechanical response 36 2005
7,889,163 Drive method for MEMS devices 26 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 3 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 67 2005
* 2006/0077,503 System and method of providing MEMS device with anti-stiction coating 30 2005
* 2006/0077,516 Device having a conductive light absorbing mask and method for fabricating same 2 2005
* 2006/0044,928 Drive method for MEMS devices 104 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 5 2005
* 2006/0077,504 Method and device for protecting interferometric modulators from electrostatic discharge 6 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7,547,565 Method of manufacturing optical interference color display 21 2005
7,527,995 Method of making prestructure for MEMS systems 45 2005
* 2006/0177,950 Method of manufacturing optical interferance color display 16 2005
* 2006/0066,598 Method and device for electrically programmable display 67 2005
* 2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 65 2005
7,808,703 System and method for implementation of interferometric modulator displays 6 2005
7,349,136 Method and device for a display having transparent components integrated therein 10 2005
* 2006/0077,393 System and method for implementation of interferometric modulator displays 14 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8,008,736 Analog interferometric modulator device 11 2005
7,710,629 System and method for display device with reinforcing substance 6 2005
* 2006/0066,600 System and method for display device with reinforcing substance 13 2005
8,124,434 Method and system for packaging a display 7 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 41 2005
7,471,444 Interferometric modulation of radiation 21 2005
7,388,706 Photonic MEMS and structures 29 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 25 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 48 2005
* 2006/0103,613 Interferometric modulator array with integrated MEMS electrical switches 12 2005
* 2006/0076,637 Method and system for packaging a display 12 2005
* 2006/0077,152 Device and method for manipulation of thermal response in a modulator 49 2005
* 2005/0286,114 Interferometric modulation of radiation 30 2005
* 2005/0286,113 Photonic MEMS and structures 30 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
* 2006/0077,527 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 2 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 7 2005
* 2006/0067,644 Method of fabricating interferometric devices using lift-off processing techniques 3 2005
7,417,783 Mirror and mirror layer for optical modulator and method 10 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 18 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 10 2005
* 2006/0077,518 Mirror and mirror layer for optical modulator and method 5 2005
* 2006/0067,646 MEMS device fabricated on a pre-patterned substrate 0 2005
RE40436 Hermetic seal and method to create the same 14 2005
8,878,825 System and method for providing a variable refresh rate of an interferometric modulator display 0 2005
7,304,784 Reflective display device having viewable display on both sides 62 2005
* 2006/0077,155 Reflective display device having viewable display on both sides 14 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 94 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 46 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 14 2005
* 2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 71 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 4 2005
7,310,179 Method and device for selective adjustment of hysteresis window 13 2005
* 2006/0077,521 System and method of implementation of interferometric modulators for display mirrors 6 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,492,502 Method of fabricating a free-standing microstructure 13 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 57 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 23 2005
* 2006/0077,528 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 9 2005
* 2006/0067,648 MEMS switches with deforming membranes 39 2005
* 2006/0066,856 Systems and methods for measuring color and contrast in specular reflective devices 2 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 33 2005
* 2006/0067,649 Apparatus and method for reducing slippage between structures in an interferometric modulator 60 2005
7,136,213 Interferometric modulators having charge persistence 23 2005
* 2006/0066,542 Interferometric modulators having charge persistence 9 2005
7,564,612 Photonic MEMS and structures 91 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 237 2005
* 2006/0067,651 Photonic MEMS and structures 97 2005
* 2006/0067,650 Method of making a reflective display device using thin film transistor production techniques 17 2005
7,369,294 Ornamental display device 59 2005
7,684,104 MEMS using filler material and method 17 2005
* 2006/0066,936 Interferometric optical modulator using filler material and method 65 2005
7,653,371 Selectable capacitance circuit 29 2005
* 2006/0077,617 Selectable capacitance circuit 22 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 6 2005
* 2006/0067,652 Methods for visually inspecting interferometric modulators for defects 4 2005
7,675,669 Method and system for driving interferometric modulators 5 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 13 2005
7,545,550 Systems and methods of actuating MEMS display elements 7 2005
* 2006/0066,560 Systems and methods of actuating MEMS display elements 61 2005
8,310,441 Method and system for writing data to MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 7 2005
* 2006/0066,937 MEMS SWITCH WITH SET AND LATCH ELECTRODES 41 2005
7,486,429 Method and device for multistate interferometric light modulation 17 2005
* 2006/0066,938 Method and device for multistate interferometric light modulation 55 2005
7,236,284 Photonic MEMS and structures 111 2005
7,630,114 Diffusion barrier layer for MEMS devices 8 2005
* 2007/0096,300 Diffusion barrier layer for MEMS devices 18 2005
8,014,059 System and method for charge control in a MEMS device 6 2005
* 2007/0058,095 System and method for charge control in a MEMS device 11 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 1 2005
7,403,323 Process control monitors for interferometric modulators 2 2005
7,369,252 Process control monitors for interferometric modulators 1 2005
7,259,865 Process control monitors for interferometric modulators 21 2005
* 2006/0077,381 Process control monitors for interferometric modulators 3 2005
* 2006/0066,872 Process control monitors for interferometric modulators 1 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
* 2007/0147,688 System and method for power reduction when decompressing video streams for interferometric modulator displays 12 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 6 2005
7,355,779 Method and system for driving MEMS display elements 6 2006
* 2007/0053,652 Method and system for driving MEMS display elements 29 2006
7,916,980 Interconnect structure for MEMS device 10 2006
* 2007/0189,654 Interconnect structure for MEMS device 6 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 15 2006
* 2007/0170,540 Silicon-rich silicon nitrides as etch stops in MEMS manufature 3 2006
8,194,056 Method and system for writing data to MEMS display elements 2 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 3 2006
* 2007/0194,414 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 6 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
* 2007/0196,944 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 46 2006
* 2007/0194,630 MEMS device having a layer movable at asymmetric rates 31 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 57 2006
* 2007/0206,267 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 9 2006
7,483,197 Photonic MEMS and structures 26 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 14 2006
7,532,377 Movable micro-electromechanical device 58 2006
7,643,203 Interferometric optical display system with broadband characteristics 34 2006
7,948,457 Systems and methods of actuating MEMS display elements 1 2006
* 2006/0250,350 Systems and methods of actuating MEMS display elements 22 2006
7,903,047 Mode indicator for interferometric modulator displays 4 2006
* 2007/0242,008 Mode indicator for interferometric modulator displays 32 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 13 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 18 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 13 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 63 2006
* 2007/0249,079 Non-planar surface structures and process for microelectromechanical systems 17 2006
* 2007/0249,078 Non-planar surface structures and process for microelectromechanical systems 27 2006
8,049,713 Power consumption optimized display update 2 2006
7,920,136 System and method of driving a MEMS display device 1 2006
7,706,044 Optical interference display cell and method of making the same 11 2006
* 2006/0250,335 System and method of driving a MEMS display device 18 2006
7,880,954 Integrated modulator illumination 25 2006
7,369,292 Electrode and interconnect materials for MEMS devices 24 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 28 2006
* 2006/0209,384 System and method of illuminating interferometric modulators using backlighting 0 2006
* 2006/0198,013 Integrated modulator illumination 32 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,161,094 Modifying the electro-mechanical behavior of devices 41 2006
* 2006/0219,435 Modifying the electro-mechanical behavior of devices 0 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 101 2006
* 2006/0274,074 Display device having a movable structure for modulating light and method thereof 2 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 31 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 15 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
* 2007/0279,753 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7,187,489 Photonic MEMS and structures 105 2006
7,636,151 System and method for providing residual stress test structures 1 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 12 2006
* 2007/0290,961 Method and apparatus for low range bit depth enhancement for MEMS display architectures 3 2006
* 2007/0177,129 System and method for providing residual stress test structures 4 2006
7,702,192 Systems and methods for driving MEMS display 1 2006
7,835,061 Support structures for free-standing electromechanical devices 17 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 60 2006
* 2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 37 2006
7,777,715 Passive circuits for de-multiplexing display inputs 4 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 19 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 5 2006
* 2008/0003,737 Method of manufacturing MEMS devices providing air gap control 3 2006
* 2008/0002,210 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 0 2006
7,566,940 Electromechanical devices having overlying support structures 23 2006
7,534,640 Support structure for MEMS device and methods therefor 22 2006
* 2007/0019,922 Support structure for MEMS device and methods therefor 3 2006
7,830,586 Transparent thin films 33 2006
7,554,711 MEMS devices with stiction bumps 64 2006
* 2006/0262,380 MEMS devices with stiction bumps 91 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 9 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 13 2006
7,928,940 Drive method for MEMS devices 0 2006
* 2007/0024,550 Drive method for MEMS devices 4 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 11 2006
* 2008/0094,686 Sacrificial spacer process and resultant structure for MEMS support structure 9 2006
7,388,697 System and method for addressing a MEMS display 16 2006
7,242,512 System and method for addressing a MEMS display 16 2006
* 2007/0035,804 System and method for addressing a MEMS display 0 2006
7,667,884 Interferometric modulators having charge persistence 6 2006
* 2007/0041,079 Interferometric modulators having charge persistence 2 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 12 2006
7,706,042 MEMS device and interconnects for same 7 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 50 2006
8,059,326 Display devices comprising of interferometric modulator and sensor 15 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 4 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
* 2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 8 2007
* 2008/0279,498 MEMS STRUCTURES, METHODS OF FABRICATING MEMS COMPONENTS ON SEPARATE SUBSTRATES AND ASSEMBLY OF SAME 40 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 16 2007
7,623,752 System and method of testing humidity in a sealed MEMS device 6 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 2 2008
* 2008/0115,569 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 1 2008
* 2008/0115,596 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 0 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 11 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 10 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
* 2008/0314,866 MIRROR AND MIRROR LAYER FOR OPTICAL MODULATOR AND METHOD 9 2008
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
8,085,458 Diffusion barrier layer for MEMS devices 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 7 2009
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,928,967 Method and device for modulating light 0 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
* 2011/0053,304 METHOD OF MAKING AN ELECTRONIC DEVICE WITH A CURVED BACKPLATE 3 2010
9,110,289 Device for modulating light with multiple electrodes 0 2011
8,971,675 Interconnect structure for MEMS device 0 2011
9,134,527 Pixel via and methods of forming the same 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,970,939 Method and device for multistate interferometric light modulation 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 2 2012
8,878,771 Method and system for reducing power consumption in a display 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
9,001,412 Electromechanical device with optical function separated from mechanical and electrical function 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
8,885,244 Display device 0 2013
9,086,564 Conductive bus structure for interferometric modulator array 0 2013
9,097,885 Device having a conductive light absorbing mask and method for fabricating same 0 2014
 
TEXAS INSTRUMENTS INCORPORATED (1)
* 5,526,688 Digital flexure beam accelerometer and method 222 1994
 
IRIDIGM DISPLAY CORPORATION (2)
7,256,922 Interferometric modulators with thin film transistors 44 2004
* 2006/0001,942 Interferometric modulators with thin film transistors 26 2004
 
CARNEGIE MELLON UNIVERSITY (2)
* 5,658,636 Method to prevent adhesion of micromechanical structures 6 1995
* 5,772,902 Method to prevent adhesion of micromechanical structures 24 1996
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 30 2004
* Cited By Examiner