Method of making a digital flexure beam accelerometer
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United States of America Patent
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Mar 9, 1993
Grant Date -
N/A
app pub date -
Oct 12, 1990
filing date -
Oct 12, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.
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