Device for continuously purifying the waste gases from a vacuum unit
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United States of America Patent
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Mar 16, 1993
Grant Date -
N/A
app pub date -
Aug 6, 1991
filing date -
Dec 9, 1989
priority date (Note) -
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Abstract
A device for continuously purifying the waste gases from a vacuum unit using a gas permeation membrane. Reduced equipment and operating costs are achieved with good separation performance, by using a single pump to both remove the waste gas stream from the vacuum unit and to create a pressure difference across the gas permeation membrane. The vacuum pump is disposed downstream from the vacuum unit and upstream from the gas permeation meambrane. In addition to being connected to the vacuum unit, the suction side of the vacuum pump is also connected to the permeate side of the gas permeation membrane.
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