Inductance-type displacement sensor for eliminating inaccuracies due to external magnetic fields

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United States of America Patent

PATENT NO 5194805
SERIAL NO

07633849

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An inductance-type displacement sensor which can measure the displacement of a measured object of magnetic material without any contact with the object. A pair of series connected coils is provided adjacent to the object so that the inductance of the coils varies in response to a displacement of the object from a predetermined position. The inductance, the number of windings, the direction of the windings and the section of each of the cores are so set that the magnetic flux produced by one of the coils runs in a direction opposite to that of the magnetic flux produced by the other coil and the densities of the respective magnetic fluxes are identical with each other.

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Patent Owner(s)

  • EBARA CORPORATION;EBARA RESEARCH CO., LTD.;JAPAN AEROSPACE EXPLORATION AGENCY;NATIONAL AEROSPACE LABORATORY, EBARA RESEARCH CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanemitsu, Yoichi Kanagawa, JP 19 514
Murakami, Chikara Tokyo, JP 89 525
Nakajima, Atsushi Tokyo, JP 145 1527
Shirao, Yuji Kanagawa, JP 18 332
Takizawa, Minoru Tokyo, JP 59 290

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