Miniaturized pressure sensor
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United States of America Patent
Stats
-
Mar 23, 1993
Grant Date -
N/A
app pub date -
Jul 11, 1991
filing date -
Jan 13, 1989
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A miniaturized pressure sensor for physiological in situ measurements has an elastic material shell having an outer surface with an opening extending therethrough. The opening is covered by an elastic diaphragm and a light conductor having an end surface is disposed inside the shell and connected thereto by a glue joint. A body of silicon or gallium is disposed inside the shell and has a thin, cantilevered, short beam portion and a reflecting surface connected to and perpendicularly projecting from a free end of the short beam portion. The reflecting surface is proximate to the end surface of the light conductor so that when the diaphragm is subjected to a pressure differential, it is forced to move thereby causing a corresponding movement of the short beam portion so that the reflecting surface is positioned opposite to the end surface of the light conductor.
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