Method and apparatus for measuring internal defects for position and depth
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United States of America Patent
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Mar 23, 1993
Grant Date -
N/A
app pub date -
May 17, 1991
filing date -
May 21, 1990
priority date (Note) -
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Abstract
A method for measuring internal defects of a specimen, comprising the steps of allowing a finely focused laser beam to be incident into a specimen from its surface and observing the scattered light of the said laser beam from inside the said specimen from the surface of the specimen and in a different direction to the optical axis of incidence of the laser beam.
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