Two-beam interferometer apparatus and method, and spectrometer utilizing the same

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United States of America Patent

PATENT NO 5196902
SERIAL NO

07773225

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Abstract

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A two-beam interferometer for Fourier spectroscopy comprises one or two reflecting channels, each having at least one relatively movable wall to vary the path length of a beam traversing the same. A beam passing through the channel makes multiple reflections therewithin, impinges upon a retroreflector, and is transferred back through the channel along the same path to recombine with a second beam, which can be similarly reflected. The multiple reflections that occur within the channel allow a large total path length change to be accomplished with a small degree of motion of the movable wall, to thereby achieve high levels of resolution.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Solomon, Peter R West Hartford, CT 28 732

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