Modular scatterometer with interchangeable scanning heads
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United States of America Patent
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Mar 23, 1993
Grant Date -
N/A
app pub date -
Jun 29, 1990
filing date -
Jun 29, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An optical measurement device produces quality light scatter measurements using Bidirectional Reflective Distribution Function (BRDF) techniques to analyze data generated from an accurate, portable, relatively inexpensive scatterometer. The scatterometer is provided with interchangeable scanning heads, each scanning head being equipped with ROM data storage containing certain configuration information about the scanning head. The use of the interchangeable scanning heads allows the present invention to make measurements of light scatter for a wide variety of applications and samples under a variety of environmental conditions where scatter measurement has previously not been feasible.
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