Pin chuck for lithography system
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United States of America Patent
Stats
-
Mar 23, 1993
Grant Date -
N/A
app pub date -
May 21, 1990
filing date -
May 21, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pin chuck holds a wafer during translation by an X-ray lithography machine. The chuck is designed to be the same size as the wafer and includes a plurality of extensions having tops along a common plane. The space between the extensions is evacuated to hold and level the wafer. In order to load or remove a wafer from the pin chuck, three extendable posts are provided which can be extended to permit a robot arm to position a wafer thereon for lowering to the pin chuck or remove a wafer therefrom lifted from the pin chuck. The three posts are triangularly positioned within a space sufficient to hold the wafer which at the same time close enough together to permit the fingers of the robot arm to fit therearound.
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