Pressure sensor
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United States of America Patent
Stats
-
Apr 13, 1993
Grant Date -
N/A
app pub date -
Aug 23, 1991
filing date -
Aug 28, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pressure sensor including at least two ceramic layers formed as elongated sheets and bonded together with a gap therebetween at one end so as to form a diaphragm of a portion of one of the ceramic layers that faces the gap and that receives on an outer surface thereof the pressure to be measured, a pressure-sensitive electrode portion from which an electric output corresponding with the pressure to be measured is generated on the basis of the amount of strain of the diaphragm that develops under the pressure to be measured, the pressure-sensitive electrode portion being provided on or around the diaphragm, and a plurality of conductor paths that are connected to the pressure-sensitive electrode portion and that extend along the length of the ceramic layers, the conductor paths having terminals at the other end of the bonded ceramic layers for connection to an external electric circuit. In another embodiment of the present invention, the pressure sensor includes a cylindrical ceramic layer, and a ceramic layer provided around the circumference of the cylindrical ceramic layer with a circumferential gap formed between the ceramic layer and the cylindrical ceramic layer at one end so as to form a diaphragm of a portion of the ceramic layer that faces the gap.
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