Method of making an optical element mold with a hard carbon film

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United States of America Patent

PATENT NO 5202156
SERIAL NO

07683537

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Abstract

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This specification discloses a mold for use for press-molding an optical element, characterized in that at least the molding surface of a mold base material is coated with an a-C:H film containing 5-40 atom % of hydrogen therein and having a film density of 1.5 g/cm.sup.3 or more, and with hard carbon film containing 0-5 atom % of hydrogen therein and having a spin density of 1.times.10.sup.18 spin/cm.sup.3 or less and a film density of 1.5 g/cm.sup.3 or more.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 1468501 ?1468501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirabayashi, Keiji Tokyo, JP 28 863
Ikoma, Keiko Yokohama, JP 13 398
Kurihara, Noriko Tokyo, JP 16 572
Taniguchi, Yasushi Kawasaki, JP 48 664
Yamamoto, Kiyoshi Yokohama, JP 84 1210

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