Method of and apparatus for synthesizing diamondlike thin film
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United States of America Patent
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Apr 20, 1993
Grant Date -
N/A
app pub date -
Jul 26, 1990
filing date -
Jul 31, 1989
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of and an apparatus for synthesizing a diamondlike thin film on a substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by one figure or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to at least one of the substrate and an internal electrode provided in the first vacuum vessel.
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