Plasma processing apparatus having driving control section
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United States of America Patent
Stats
-
Apr 20, 1993
Grant Date -
N/A
app pub date -
Nov 29, 1991
filing date -
Nov 30, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A plasma processing apparatus includes a plasma processing section and a control section for controlling an operation of a driving system of the processing section. The control section includes a CPU, arranged to be separated from the plasma processing section, for outputting a digital control signal to the driving system of the plasma processing section, a first converter, arranged on the CPU side, for converting a parallel signal from the CPU into a serial signal, a second converter, arranged on the processing section side, for converting the serial signal from the first converter into a parallel signal and outputting the parallel signal to the processing section, a cable for transmitting a serial signal between the first converter and the second converter, and a timing control circuit for controlling timings of transmission/reception signals of the first and second converters.
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