Method for delivering an involatile reagent in vapor form to a CVD reactor
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United States of America Patent
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Apr 20, 1993
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app pub date -
Dec 13, 1991
filing date -
Jul 6, 1990
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Abstract
A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporization matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may suitably com GOVERNMENT RIGHTS IN INVENTION This invention was made with Government support under Contract No. N00014 88-0531 awarded by the Defense Advanced Projects Research Administration (DARPA). The Government has certain rights in this invention.
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