Apparatus to clean solid surfaces using a cryogenic aerosol
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United States of America Patent
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-
May 11, 1993
Issued Date -
N/A
app pub date -
Oct 9, 1992
filing date -
Apr 15, 1992
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
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