Tapered cantilever beam for sensors
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United States of America Patent
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May 11, 1993
Grant Date -
N/A
app pub date -
Oct 22, 1990
filing date -
Oct 22, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of making a sensor with a mass (14) that is supported by at least one tapered cantilever beam (11). Tapered cantilever beam or beams (11) can be used in either capacitive or piezo-resistive structure. Increased sensitivity and decreased fragility is obtained by using the tapered cantilever beam.
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