Importance

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Abstract

A pressure sensor assembly is provided containing a substrate having signal conditioning circuitry disposed on both surfaces of the substrate, with the critical pressure sensing element disposed on one surface of the substrate and the laser trimmable resistors disposed on the other surface of the substrate. The preferred ported housing of this invention seals the one side of the substrate containing the pressure sensing element thereby forming a pressurizable chamber, while allowing the signal conditioning circuitry and resistors on the other surface exposed for calibration by laser trimming of the resistors. This eliminates the requirement for a separate housing for the critical pressure sensing element. In addition, when the preferred ported housing is mounted to the pressure sensing side of the substrate for formation of the sealed pressure chamber, the through-holes which electrically interconnect the signal processing circuitry on both sides of the substrate are also concurrently sealed.

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First Claim