Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
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United States of America Patent
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May 11, 1993
Grant Date -
N/A
app pub date -
Jul 23, 1991
filing date -
Jul 26, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A piezoelectric/electrostrictive actuator including a ceramic substrate (2, 10, 16, 22, 38) and a piezoelectric/electrostrictive portion (26, 28, 29, 30, 33a, 33b, 36a, 36b, 37, 39). The ceramic substrate has at least one recess (6, 14, 20, 24, 42) having a bottom surface which defines a thin-walled portion (8a, 22a), and the piezoelectric/electrostrictive portion is formed on the thin-walled portion of the ceramic substrate.
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