Semiconductor metal composite field emission cathodes

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United States of America Patent

PATENT NO 5211707
SERIAL NO

07728444

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Abstract

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A field emission cathode having a parallel array of individual electrically conductive rods of metal silicide or germanide in a silicon-based or germanium-based single crystal matrix. Each rod has an emission end exposed at one major surface of the cathode and an ohmic contact end exposed at an opposite major surface. In a preferred cathode, the matrix and rod materials are the constituents of a eutectic composition. The cathode is fabricated by a process involving producing a composite boule from a eutectic composition of a silicon-based or germanium-based material and a metal. The composite cathode body is cut from the boule so that the rods are generally normal to the major surfaces. Etching may be used to expose a uniform length of the rods at the emitting surface.

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Patent Owner(s)

  • GTE LABORATORIES INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ditchek, Brian M Milford, MA 12 177
Gustafson, John C Harvard, MA 3 33
Neifeld, Mark A Tucson, AZ 6 74

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