Electrostatically controlled beam steering device and method
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United States of America Patent
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-
May 18, 1993
Grant Date -
N/A
app pub date -
Mar 4, 1992
filing date -
Mar 4, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A device for steering light and its method of manufacture are disclosed. The device in the preferred embodiment consists of a multi-layer structure on a substrate. The substrate contains at least one electrode (36) for addressing a deflectable element (16) causing it to deflect towards the activated electrode (36). Upon the deflectable element (16) is at least one support post (62) which is positioned approximately along the axis of rotation (24) of the deflectable element (16). A reflecting element (61) is supported by the post (62) and deflects as the first element (16) deflects. The second element (62) is of far greater extent than the first element (16). Additionally, the method of manufacture of such a device is disclosed.
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Family
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Cited Art Landscape
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