Serial pumping for portable handling tool of electronic workpieces
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 8, 1993
Grant Date -
N/A
app pub date -
May 14, 1992
filing date -
May 14, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A battery-powered portable tool for handling electronic workpieces, such as semiconductor wafers, wherein a desired pressure differential is generated by a serial connection of vacuum pumps. The tool includes a number of features which minimize the generation of particulate matter. The pumps are sealed in an airtight chamber to prevent the release of particles created during operation of the pumps. The tool is exhausted directly to the ambient atmosphere to prevent pump exhaust from disturbing particles within the tool. The valve is designed to provide a quick release of even lightweight workpieces and to minimize the sliding of valve components against each other. Submicron filtering removes any particles from the pump exhaust.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully