Apparatus for inspecting internal circuit of semiconductor device
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United States of America Patent
Stats
-
Jun 8, 1993
Grant Date -
N/A
app pub date -
Dec 9, 1991
filing date -
Dec 6, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for inspecting an internal circuit of a semiconductor device is provided, wherein an inspection table having an inspection equipment such as a microscope, a positioner or the like mounted thereon is constructed into a vibration-proof structure. On a frame surrounding a tester is horizontally supported an inspection table through air spring structures arranged on four corners of the frame, so that vibration or shock produced from a floor or the tester may be effectively absorbed by the air spring structures, to thereby be prevented from adversely affecting a semiconductor device to be inspected. Also, the semiconductor device is set on a socket of a socket-equipped board arranged above the tester in a manner to be close proximity to the tester, so that a substantially true signal may be obtained.
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