Arrangement for testing semiconductor wafers or the like
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United States of America Patent
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-
Jun 15, 1993
Grant Date -
N/A
app pub date -
Mar 25, 1992
filing date -
Mar 26, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus for testing semiconductor wafers and the like includes a prober table for receiving the semiconductor wafers to be tested and a holder receiver for receiving holders for probes or test needles. The prober table is arranged within a container having an open upper portion that has a plate having an opening through which pass the probes or test needles into the container. Discharge elements are provided within the container that are connected via a connection to a source for air, gas or the like.
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