Probe apparatus
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United States of America Patent
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-
Jun 15, 1993
Grant Date -
N/A
app pub date -
Jun 12, 1992
filing date -
Jun 12, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A probe apparatus has a mount on which the object to be examined is placed, a large number of vertical probe needles, brought into contact with electrode pads of the object to be examined, for measuring the electrical characteristics of the object to be examined, and a cleaning block including a cleaning member for removing waste adhered to the vertical probe needles, the cleaning member including a cloth which is made up of extra fine fibers. Using the cleaning member, waste and the like adhered to the vertical probe needles can be removed, ensuring the long life of the vertical probe needles.
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