Single wafer processor with a frame
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United States of America Patent
Stats
-
Jun 29, 1993
Issued Date -
N/A
app pub date -
Jan 11, 1991
filing date -
May 18, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A single wafer processing apparatus includes a portable processing head that can be a portable module or a movable unit mounted to a supporting machine frame. The processing head has movable fingers adapted to grip a wafer. The fingers protrude from a protective wafer plate. Indexing and rotation monitoring assemblies are provided for automation of the wafer processing steps. A complementary processing base includes an upwardly-open bowl that receives a wafer held by the portable processing head. It has a full-diameter movable bottom wall for rapid draining purposes. Liquid and/or gas jets and nozzles supply fluids required within the bowl for processing of wafers.
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