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Abstract

A simple high resolution optical scanner consists of high numerical aperture lens mounted at the end of a flexible cantilever. The lens scans along a curved line as the cantilever bends. In order for the optical path to track the lens position, a mirror is mounted on the cantilever at a point located about 20% of the cantilever length, measured from the fixed mounting point. As the cantilever bends, the angle at this point is half of the angle at the cantilever end. Since the mirror doubles this angle when reflecting the input beam, the input beam will track, and stay parallel to, the lens at the end of the cantilever. This type of scanner is particularly suited to operate in a resonant mode, since the cantilever shape has low inherent damping.

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First Claim