Method for cleaning closed spaces with ultraviolet rays
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United States of America Patent
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-
Jul 6, 1993
Grant Date -
N/A
app pub date -
Oct 29, 1991
filing date -
Nov 2, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Cleaning a closed space such as safety cabinets, clean boxes, safes and wafer storage spaces are performed by irradiating a photoelectron emitting member with ultraviolet rays and/or other forms of radiation to emit photoelectrons into the closed space, electrically charging the fine particles in the closed space with the emitted photoelectrons, and removing the charged fine particles from the closed space.
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Cited Art Landscape
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