Method of producing diamond films
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United States of America Patent
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Jul 6, 1993
Issued Date -
N/A
app pub date -
Jan 4, 1990
filing date -
Jul 11, 1986
priority date (Note) -
Expired
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Abstract
Disclosed is a method for the production of diamond films, which comprises introducing a diamond-forming gas into a reaction chamber in which a substrate is located, activating the gas in the reaction chamber and depositing diamond on the substrate by decomposition of the gas, wherein the diamond-forming gas is a gas or gas mixture containing hydrogen, oxygen and carbon atoms at an atomic ratio satisfying requirements represented by the following formulae: 2.gtoreq.C/H.gtoreq.0.0005, and 4.gtoreq.O/C.gtoreq.0.0005.
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