Digital micromirror shutter device
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United States of America Patent
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-
Jul 6, 1993
Grant Date -
N/A
app pub date -
Apr 26, 1991
filing date -
Apr 26, 1991
priority date (Note) -
In Force
status (Latency Note)
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Abstract
There is disclosed a device that consists of a micro-mechanical switch consisting of an electrode, a gap between the electrode and an individually deflectable element, which has a vertical shutter attached to its underside. When the electrode is addressed the movement of the deflectable element causes the shutter to raise or lower. Such a device can be used in switching. One embodiment of such a use in waveguides is disclosed along with the method of manufacture.
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Cited Art Landscape
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