Silicon-mass angular acceleration sensor
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United States of America Patent
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-
Aug 3, 1993
Issued Date -
N/A
app pub date -
Jun 4, 1992
filing date -
Jul 14, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
From a silicon block or wafer a stationary frame is shaped and a seismic mass which is displaceable in rotation is mounted within the frame. The seismic mass is symmetrically suspended in the frame by two pairs of oppositely located flexible strips and either piezoresistive or capacitive detection of rotation is provided by the strips, the capacitive detection beeing provided with the help of parallel stationary electrodes connected to and insulated in the frame. In another embodiment an anchor stud in the center of the frame has two flexible interlaced spirals extending therefrom and their respective outer turns carry radial disposed masses with finger structures extending circumferentially in both directions. Stationary finger structures are provided to provide interfitting variable capacitors sensitive to rotary displacements.
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