Resonant mirror and method of manufacture
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United States of America Patent
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-
Aug 3, 1993
Grant Date -
N/A
app pub date -
Dec 20, 1991
filing date -
Dec 20, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A resonant mirror is disclosed which comprises a deflectable mirror generally planar with the stop surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements. At least one supporting element is displaced from an edge of the mirror. The supporting elements, being collinear, define an axis of rotation about which the mirror may oscillate to steer incident light through an angle.
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