Importance

Loading Importance Indicators...

Abstract

A microaccelerometer is provided for use in on-board automotive safety control and navigational systems. The microaccelerometer includes a central support body which is supported upon a backing chip, a peripheral proof mass which circumscribes the central support body, and at least one pair of microbridges, each of which are attached to both the central support body and the peripheral proof mass. The pair of microbridges extend outwardly in opposite directions from the central support body such that a longitudinal axis through each of the microbridges forms a common axis through the central support body. The microbridges are attached to the peripheral proof mass at the end opposite the central support body so as to suspend the peripheral proof mass circumferentially about the central support body and above the backing chip. Piezoelectric drivers and sensors are provided, respectively, for exciting the microbridges at their resonant frequencies, and for detecting changes in the resonant frequencies of the microbridges which occur as a function of acceleration of the peripheral proof mass. The sensors are connected to a feedback circuit which amplifies and buffers their output and provides feedback to the drivers to properly maintain the microbridges at their resonant frequencies.

Loading the Abstract Image...

First Claim